Material Science and MEMS Production : Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /

Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Mate...

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Bibliographic Details

Corporate Author:	International Conference on MEMS and Nanotechnology Shenzhen, China
Other Authors:	Liu, Changhui (Editor)
Format:	Electronic Conference Proceeding eBook
Language:	English
Published:	Zurich, Switzerland : Trans Tech Publications, [2014]
Subjects:	Microelectromechanical systems > Congresses. Nanotechnology > Congresses. Electronic books.
Online Access:	Full text (MFA users only)
ISBN:	9783038264286 3038264288
ISSN:	1662-8985 ; 1662-8985
Local Note:	ProQuest Ebook Central